Ion source with combined cathode and transfer line heating
نویسندگان
چکیده
منابع مشابه
Ion energy distribution and gas heating in the cathode fall of a direct-current microdischarge.
This paper reports on measurements of the ion energy distribution (IED) at the cathode of an argon dc microdischarge using energy-resolved molecular beam mass spectrometry. The measurements are conducted at a fixed pressure-electrode separation product (pd) of 1 cm Torr with a maximum discharge pressure of 20 Torr. The measured IED is compared to the theory of Davis and Vanderslice [W. D. Davis...
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ژورنال
عنوان ژورنال: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
سال: 1992
ISSN: 0168-583X
DOI: 10.1016/0168-583x(92)95926-i